发明名称 METHOD FOR THE PRODUCTION OF CONTACTS FOR INTEGRATED CIRCUITS AND SEMICONDUCTOR COMPONENT WITH SAID CONTACTS
摘要 One (or more) contacts are produced on one or more active areas of a semiconductor wafer, it being possible for one or more isolated control lines to be arranged on the active areas with which contact is to be made. The control lines may, for example, be gate lines. The semiconductor component is fabricated in the following way: application of a polysilicon layer to the semiconductor wafer, patterning of the polysilicon layer, in order to produce a polysilicon contact above the active area, the polysilicon contact at least partly covering the two control lines, application of a first insulator layer to the semiconductor wafer, with the polysilicon contact being embedded, partial removal of the first insulator layer, so that at least the upper surface of the polysilicon contact is uncovered, and application of a metal layer to the semiconductor wafer in order to make electrical contact with the polysilicon contact.
申请公布号 KR20040015792(A) 申请公布日期 2004.02.19
申请号 KR20047000251 申请日期 2002.07.05
申请人 发明人
分类号 H01L21/28;H01L21/60;H01L21/768;H01L21/8242;H01L27/108 主分类号 H01L21/28
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