摘要 |
PROBLEM TO BE SOLVED: To perform an optimize image processing by appropriately correcting a defect in shape information obtained from the image of an object. SOLUTION: A distance image creation part 300 processes the image of an object to measure the distance to each point on the object. A blocking part 302 divides the measured values on blocksζkl, and an approximation function computation part 304 uses the method of least squares to compute a function f(i, j) approximating the shape of the blocksζkl from non-defective measured values in the blocksζkl. A defect count determination part 306 determines whether a defect count in the blocksζkl is smaller than a threshold or not, and an interpolation processing part 308 interpolates defects in the blocksζkl with the function f(i, j) computed by the approximation function computation part 304. An image conversion part 310 uses the interpolated measured values to develop the curved image of the object on a plane. COPYRIGHT: (C)2004,JPO |