| 摘要 |
PROBLEM TO BE SOLVED: To provide aluminum oxide particles having a specified average particle size, crystal structure, and particle form particularly suitable for a polishing sheet and a polishing liquid and to provide a method for manufacturing the particles. SOLUTION: An aqueous solution of an aluminum salt is added to an alkali aqueous solution to obtain an aluminum hydroxide or hydrate, which is heat treated in a temperature range from 110 to 300°C in the presence of water, filtered and dried to obtain boehmite particles. The particles are heat treated in a temperature range from 450 to 1,500°C in air. Thus, tabular alumina particles having a single structure ofγ,δ,θorα-alumina or a mixture of two or more kinds of crystal structures and having 10 nm to 100 nm average particle diameter in the plane direction of particles are obtained. COPYRIGHT: (C)2004,JPO |
