| 摘要 |
PROBLEM TO BE SOLVED: To reduce a drift (a positional shift) of micro-working members (a sample holding member, a probe holding member, an aperture holding member for a beam-diaphragm) due to an ambient atmospheric fluctuation. SOLUTION: The apparatus is provided with a position adjustment member 34 having a piezo-element 34b deforming according to an impressed voltage and changing a position in a movement direction of a micro-working member Ha on an inside end part of a holder H and adjusting the position in the movement direction of the micro-working member Ha on the inside end of the holder H by deformation of the piezo-element 34b, an air pressure sensor 42 detecting an atmospheric pressure acting on an outside end part of the holder H, and a piezo-element drive circuit driving then piezo-element 34b so as to prevent a positional fluctuation of the micro-working member Ha on the inside end part of the holder H generated in accordance with a fluctuation of a detected value of the air pressure sensor 42. COPYRIGHT: (C)2004,JPO
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