发明名称 COATING INSTALLATION
摘要 The invention relates to a coating installation comprising a recipient (1) which is divided into a cathode side (3) and a substrate side (4) by means of a screen (2). The cathode side (3) and the substrate side (4) respectively have a direct extraction outlet (10, 16) and a gas admission (8, 14). The gas admission (8) on the cathode side (3) is connected to a process gas source (9) and the gas admission (14) for the substrate side (4) is connected to a reactive gas source (15).
申请公布号 WO03087426(A3) 申请公布日期 2004.02.19
申请号 WO2003DE01216 申请日期 2003.04.11
申请人 APPLIED FILMS GMBH & CO. KG;GEISLER, MICHAEL;KASTNER, ALBERT;SZYSZKA, BERND;PFLUG, ANDREAS;MALKOMES, NIELS 发明人 GEISLER, MICHAEL;KASTNER, ALBERT;SZYSZKA, BERND;PFLUG, ANDREAS;MALKOMES, NIELS
分类号 C23C14/34;C23C14/00;C23C14/35 主分类号 C23C14/34
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