| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for designing and a method for evaluating a ferroelectric capacitor by which switching of a ferroelectric film can be estimated more correctly. SOLUTION: According to the method of designing a ferroelectric capacitor, an amount of polarization p(t) at the time t is determined by the expression (1), when g(z) is defined as a distribution function of generation probability of inversion nuclei and d(z) is defined as a proportion of region in which polarization state is not changed. By using the result, at least one of an applied voltage, a working speed and a thickness of the ferroelectric film is determined. COPYRIGHT: (C)2004,JPO
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