PIEZOELECTRIC ACTUATOR UNIT AND LIQUID INJECTION HEAD USING IT, AND PIEZOELECTRIC ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To stabilize the liquid discharge characteristics of a liquid injection head.

SOLUTION: The piezoelectric element 26 of a multilayer structure has an upper piezoelectric substance layer 34 and a lower piezoelectric substance layer 35 which are stacked. A driving electrode 33 is formed between the upper piezoelectric substance layer 34 and the lower piezoelectric substance layer 35. A common upper electrode 36 is formed on the surface of the upper piezoelectric substance layer 34 and a common lower electrode 37 is formed between the lower piezoelectric substance 35 and a vibrator 23. Both the ends of the lower piezoelectric substance layer 35 in the direction of its length are extended outward from both the ends of a pressure chamber. Also, both the ends of the upper piezoelectric substance layer 34 in the direction of its length are extended outward from both the ends of the pressure chamber.

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