| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an efficient manufacturing method for a glass disk substrate for a magnetic recording medium which can be applied to even a magnetic disk device of which magnetic head floating quantity is approximately 50 nm. <P>SOLUTION: In this manufacturing method of a glass disk substrate for a magnetic recording medium, both main surface of a glass disk substrate are ground simultaneously at a grinding speed of 0.014μm/min-0.036μm/min per/one side using a grinding slurry and a grinding pad including a grinding particle of which diameter is 0.02μm∼0.2μm, glass thickness to be ground is made 0.15μm to 0.3μm per each grinding face, also difference of reduction thickness in both grinding faces is made 0.15μm or less, an average value of difference between the maximum value and the minimum value of unevenness per 12μm square measured by an atomic force microscope in each grinding face is made 15nm or less, when an outer diameter of the glass disk substrate is assumed to 34mm, an inner diameter is assumed to 8mm, and disk thickness is assumed to 0.381mm, warp should not exceed 2μm. <P>COPYRIGHT: (C)2004,JPO</p> |
