| 摘要 |
In accordance with the present invention, compositions and methods are provided in which a layered low dielectric constant nanoporous material is produced that comprises a first layer justaxposing a substrate, a second nanoporous layer juxtaposing the first layer, and an additional layer juxtaposing the second layer. The layered dielectrics of the present invention are formed using nanoporous materials by (a) depositing a first layer on a substrate, (b) depositing a second layer that is nanoporous and that juxtaposes the first layer, (c) treating the second layered material to produce nanoporosity, and (d) depositing at least one additional layer that partially juxtaposes the second layer. A layer of wires or other electronic components can also be situated between the substrate layer and the first layer. |
