| 发明名称 |
SWINGING OBJECTIF RETARDING IMMERSION LENS ELECTRON OPTICS FOCUSING, DEFLECTION AND SIGNAL COLLECTION SYSTEM AND METHOD |
| 摘要 |
A swinging objective retarding immersion lens system and method where a particle source (102) creates a beam of charge particles which are focused and whose energy is controlled by a magnetic lens (115) and a plurality of deflection electrodes (120a, 120b, 120c, 120d). |
| 申请公布号 |
WO03081286(A3) |
申请公布日期 |
2004.02.19 |
| 申请号 |
WO2002US22045 |
申请日期 |
2002.03.21 |
| 申请人 |
HERMES-MICROVISION, INC.;CHEN, ZHONG-WEI |
发明人 |
CHEN, ZHONG-WEI |
| 分类号 |
G01N23/00;G21G5/00;H01J3/14;H01J3/26;H01J37/141;H01J37/28;H01J47/00 |
主分类号 |
G01N23/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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