发明名称 |
MANUFACTURE OF FINE-GRAINED ELECTROPLATING ANODES |
摘要 |
A continuously cast copper ingot is made by a procedure in which turbulence is imparted to the metal/solid interface during the casting operation. The ingot is then hot worked to form a billet having a smaller average grain size and a larger diameter than possible in the past. The billet is especially useful for making electroplating anodes used in the damascene process for making copper interconnects in silicon wafers. |
申请公布号 |
KR20040015767(A) |
申请公布日期 |
2004.02.19 |
申请号 |
KR20037017205 |
申请日期 |
2003.12.30 |
申请人 |
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发明人 |
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分类号 |
B21B3/00;C25B11/04;B21B1/02;B22D7/00;B22D11/00;C22F1/08;C25D17/10 |
主分类号 |
B21B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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