| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of performing digital lithography obtaining smooth components such as diagonal metal wires and curved metal wires, satisfactory resolution and redundancy, high optical energy efficiency, and high productivity and resolution. <P>SOLUTION: This method has a process of exposing a first pixel element to a first site of an object, a process of re-positioning the object in such a manner that a second pixel element is aligned with the first site, and a process of adjusting the focal point of the second pixel element to the first site of the object, thereby allowing the exposure from the second pixel element to overlap the exposure from the first pixel element not entirely but partially. <P>COPYRIGHT: (C)2004,JPO |
