| 摘要 |
PROBLEM TO BE SOLVED: To enable a voltage which is applied among movable electrodes and fixed electrodes to be set at a low voltage value and to miniaturize the whole body of a light switching device and to raise the reliability of the device by stabilizing switching operations of rays of light. SOLUTION: A mirror part 13 for switching rays of light is formed at a movable body 12 which is made to be able be displaced on a substrate 11. The movable body 12 is supported by movable supporting beams 14, 16 which prolong to both sides of the left side and the right side. The movable supporting beams 14, 16 are arranged by being inclined obliquely with respect to the movable body 12 and they are formed as movable electrodes 15, 17. Fixed electrodes 18, 19, 22, 23 which are opposed to these movable electrodes 15, 17 with each other while holding them from both sides of the displacement direction of the body 12 are arranged respectively at both sides of the left side and the right side of the body 12. The fixed electrodes 18 and 19 and the fixed electrodes 22 and 23 are formed respectively in shape forming roughly chevron shape so that an inter-electrode distance becomes smaller gradually as the distance is away farther from the body 12. COPYRIGHT: (C)2004,JPO |
