| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer holding device for a chip that can prevent the chip from falling or displacement while moving the chip, and furthermore to prevent it from being caught in an uneven part of a ceiling surface during transferring. SOLUTION: The transfer holding device for the chip is provided with a housing hole 2a wherein a chip W is housed on a turn table 2 and a suction passage 15 for sucking and holding the chip W, and it transfers the chip W while the chip W is sucked and held within the housing hole 2a. In this case, the suction passage 15 is provided with a first suction passage 15a that positions and holds the chip W at a transfer position X when transferring it, and a second suction passage 15b that positions and holds the chip W at a measurement position Y when pushing up it from the transfer position X. COPYRIGHT: (C)2004,JPO |
