| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring machine of thickness in a plate-like material that does not contaminate or scratch works, is not affected by the material of the works and a surface state, has a wide measurement range, and can easily measure even a work having warpage in various kinds or shapes. SOLUTION: An air micrometer 50 having an A/E converter 52 for converting a change in the position of the lower surface of a work detected by using a lower detection nozzle 51 measures the position of the lower surface of the work W. At the position of the upper surface of the work, air is sprayed toward the upper surface of the work W by the upper detection nozzle. Floating is made as it is while maintaining a fixed gap to the upper surface of the work. Then, the amount of travel is measured by a floating type length measuring apparatus 20 for measuring by a displacement 30, and the thickness is calculated from both the measurement values by a controlling section 70. COPYRIGHT: (C)2004,JPO
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