APPARATUS AND METHOD OF IMPROVING IMPEDANCE MATCHING BETWEEN AN RF SIGNAL AND A MULTI-SEGMENTED ELECTRODE

摘要

An apparatus and method of improving impedance matching between a RIF signal and a multi-segmented electrode in a plasma reactor powered by the RF signal. The apparatus and method phase shifts the RIF signal driving one or more electrode segment of the multi-segmented electrode, amplifies the RIF signal, and matches an impedance of the RIF signal with an impedance of the electrode segment, where the RIF signal is modulated prior to matching of the impedance of the RIF signal. The apparatus (fig. 3) and method directionally couples an output of the matching of the impedance of the RIF signal and the electrode segment, and adjusts the output of the matching of the impedance of the RF signal such that a directionally coupled output signal and a reference signal representing the RIF signal at the output of the master RF oscillator produces a demodulated signal of minimal amplitude.