| 发明名称 |
Alternative dry cleaning medium with diverse applications, contains carbon dioxide and nitrous oxide in fifty-fifty proportions |
| 摘要 |
The cleaning medium contains carbon dioxide and at least 50 vol% nitrous oxide. An Independent claim is included for the cleaning method.
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| 申请公布号 |
DE10236493(A1) |
申请公布日期 |
2004.02.19 |
| 申请号 |
DE20021036493 |
申请日期 |
2002.08.09 |
| 申请人 |
MESSER GRIESHEIM GMBH |
发明人 |
DONNERHACK, ANDREAS;VOLKER, WOLFGANG |
| 分类号 |
B08B7/00;D06F37/20;D06F43/00;H01L21/00;H01L21/306;(IPC1-7):C11D7/02 |
主分类号 |
B08B7/00 |
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