Optical topometer for simultaneous determination of surface topometry and material properties, in which surface height is determined on a point by point basis in addition to the ellipsometric angle

摘要

Optical ellipso-height topometer for topometry of object surfaces has means for determination of surface height on a point by point basis and for each measurement point simultaneous determination of the ellipsometric angle, so that material properties can be simultaneously determined. Thus local layer thickness of a thin layer, complex refractive index and dirt layer thickness can be determined.