| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To resolve problems that in the case of forming an emitter using a carbonaceous needle-like substance such as carbon nanotube, high luminous efficiency can not be obtained due to entanglement of the carbonaceous needle-like substance and ununiformity of orientation. <P>SOLUTION: The manufacturing method of the electron emitting element comprises a process in which a cathode electrode layer 4, an insulating layer 5, and a gate electrode layer 6 are laminated in order on one face of an insulating substrate 3, a process in which a gate hole 7 is formed on the insulating substrate 3 in a state of partially exposing the cathode electrode layer 4, a process in which an emitter 8 is formed on the cathode electrode layer 4 in the gate hole 7 by a plurality of carbonaceous needle-like substance 4, a process in which an electrode layer 13 is formed on the rear face of the insulating substrate 3, and a process in which voltage is impressed between the cathode electrode layer 4 and the electrode layer 13 by using a high voltage power supply 14 and, by impressing the same voltage on the gate electrode layer 6 as the cathode electrode layer 4, a plurality of carbonaceous needle-like substance 9 are nearly vertically oriented to the insulating substrate 3. <P>COPYRIGHT: (C)2004,JPO</p> |
