SUBSTRATE FOR ELECTRO-OPTIC DEVICE, MANUFACTURING METHOD OF SUBSTRATE FOR ELECTRO-OPTIC DEVICE, LIQUID CRYSTAL DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate for an electro-optic device with excellent optical characteristics and electric characteristics, and hardly giving rise to deformation on a base material.

SOLUTION: The method includes an amorphous layer forming process forming an amorphous layer 9a on a substrate 101, a crystal nucleus forming process generating crystal nucleuses in the amorphous layer 9a under a heat treatment of 140 to 160°C , and a crystal growth process obtaining a conductive layer 9 by growing the crystal nucleuses generated under a heat treatment of 70 to 90°C.

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