发明名称 SPECIMEN FIXING TABLE AND SPECIMEN INSPECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a specimen fixing table and a specimen inspection method for abridging specimen preparation time when a cross-section TEM (Transmission Electron Microscope) specimen is prepared out of a planar TEM specimen. SOLUTION: This specimen fixing table has an opening part extending from a first face of a rectangular solid to its second face facing on the first face, the rectangular solid being a hexahedron with an outer shape wherein all the adjacent faces cross at right angles. A specimen is fixed on the first or second face so as to partly cover the opening part in the fixing table. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004053297(A) 申请公布日期 2004.02.19
申请号 JP20020208027 申请日期 2002.07.17
申请人 RENESAS TECHNOLOGY CORP 发明人 HASHIKAWA NAOTO
分类号 G01N1/32;G01N1/28;H01J37/20;(IPC1-7):G01N1/28 主分类号 G01N1/32
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