| 摘要 |
PROBLEM TO BE SOLVED: To provide a small table device having a position detecting function with high precision. SOLUTION: The table device B is equipped with moving tables 12, 13 and 17 which is arranged opposite to a base member 11 and can move to the base member 11 in two non-parallel axial directions and couples of position sensors 82X and 82Y, and 62X and 62Y which comprise light emission parts 82X and 82Y and light reception parts 62X and 62Y and detect the positions of the moving tables in the two axial directions. Each position sensor is so provided that one of its light emission part and light reception part is arranged on the moving table 17 and optical paths X and Y between the light emission part and light reception part are parallel to the movement plane of the moving table and not parallel to other optical paths. COPYRIGHT: (C)2004,JPO
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