| 摘要 |
PROBLEM TO BE SOLVED: To provide a mold and a manufacturing method therefor, which can simultaneously enhance the accuracy and life of the mold. SOLUTION: In this mold 10, a mold pattern 2A is provided in a substrate 2 which is composed of nickel or a nickel alloy; a metallic layer 4, which is composed of any one of tantalum, chromium and titanium, is formed on the surface of the mold pattern 2A; and an oxidized layer 6 of the metal is formed on the surface of the metallic layer 4. COPYRIGHT: (C)2004,JPO
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