Method of producing self-supporting microstructures, thin flat parts or membranes, and method of measuring weak gas flows with an assembly incorporating the self-supporting microstructures as resistance grids

摘要

Firstly, a supporting frame is produced, whose opening is spanned by an auxiliary layer flush on one side. Following the production of microstructures, flat parts or membranes on the common plane defined by the auxiliary layer and the supporting frame, the auxiliary layer is removed, preferably by etching. In a preferred application, the self-supporting microstructures produced in accordance with the method of the invention are used as electrically heatable resistance grids in a device for measuring weak gas flows.