发明名称 |
SOLID-STATE VIBRATING ACCELERATION SENSOR DEVICE AND METHOD |
摘要 |
The present invention provides a solid-state acceleration sensor device formed by thin films for generating an electrical voltage output proportional to acceleration motion. The precision thin-film piezoelectric elements are configured and arranged on a semi-rigid structure to detect acceleration while rejecting spurious noise created by package strain, thermal gradients, and electromagnetic interference. |
申请公布号 |
WO2004015429(A1) |
申请公布日期 |
2004.02.19 |
申请号 |
WO2003US25085 |
申请日期 |
2003.08.08 |
申请人 |
TRIAD SENSORS, INC.;SCHILLER, PETER, J. |
发明人 |
SCHILLER, PETER, J. |
分类号 |
G01P9/04;G01P15/09;G01P15/097;G01P15/10;G01P15/18 |
主分类号 |
G01P9/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|