发明名称 SEPARATING OF OPTICAL INTEGRATED MODULES AND STRUCTURES FORMED THEREBY
摘要 A structure having an optical element (40) thereon has a portion of the structure extending beyond a region having the optical element in at least one direction. The structure may include an active element (10), with the different dimensions of the substrates forming the structure allowing access for the electrical interconnections (22) for the active optical elements (10). Different dicing techniques may be used to realize the uneven structures.
申请公布号 WO02071560(A3) 申请公布日期 2004.02.19
申请号 WO2002US06688 申请日期 2002.03.05
申请人 DIGITAL OPTICS CORPORATION;KATHMAN, ALAN, D.;HAN, HONGTAO;MATHEWS, JAY;HAMMOND, JOHN, BARNETT 发明人 KATHMAN, ALAN, D.;HAN, HONGTAO;MATHEWS, JAY;HAMMOND, JOHN, BARNETT
分类号 H01L27/14;G02B6/42;H01L21/301;H01S5/02 主分类号 H01L27/14
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