DETECTION AND MAKING OF ULTRALOW LEAD CONTAMINATED UV OPTICAL FLUORIDE CRYSTALS FOR < 200 NM LITHOGRAPHY

摘要

The invention provides a method of detecting sub-ppm lead impurity levels in a below 200 nm transmitting optical calcium fluoride crystal. The method includes providing a below 200 nm wavelength transmitting optical calcium fluoride crystal , providing a fluorescence spectrometer having a light source for producing a 200 to 210 nm selectable wavelength incident radiation and a detector for detecting excited luminescence light in the wavelength range of 210-260 nm produced by the incident radiation, exciting a first luminescence area of the crystal with the 200 to 210 nm selectable wavelength incident radiation and detecting with the detector excited 210 to 260 luminescence light produced from the crystal luminescence area by the 200 to 210 incident radiation to provide a lead ppb impurity level measurement less than 100 ppb. The invention provides for improved manufacturing of below 200 nm wavelength optical elements and optical fluoride crystals such as ultralow lead contaminated calcium fluoride.