发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit which includes a fundamental aggregate element wherein a gate pattern (shape of a gate) can be always finished uniform after a wafer process. SOLUTION: On a semiconductor substrate (not shown in Figure), a p-type active region 1 and an n-type active region 2 are formed. Above these active regions 1 and 2, three gate interconnection lines 3, 4, and 5 are formed. In the p-type active region 1, projecting portions to form contact holes 6 and 7 therein are formed on the side opposite from one facing the n-type active region 2 (the upper side of the p-type active region 1 in Figure). The contact hole 6 formed in the projecting portion is formed between the gate interconnection lines 3 and 4, while the contact hole 7 formed in the projecting portion is formed between the gate interconnect lines 4 and 5. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004055823(A) 申请公布日期 2004.02.19
申请号 JP20020211184 申请日期 2002.07.19
申请人 RENESAS TECHNOLOGY CORP 发明人 SHIBUYA KOJI
分类号 H01L21/822;H01L21/82;H01L21/8238;H01L27/04;H01L27/092;H01L27/118;(IPC1-7):H01L21/82;H01L21/823 主分类号 H01L21/822
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