FLOW RATE CONTROL DEVICE, AND PRESSURE CONTROL VALVE TO BE USED THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive flow rate control device suitable for minute quantity of fluid and capable of suppressing the influence of pressure variation as much as possible when the pressure variation is generated on the secondary side of the flow rate control device, and to provide a pressure control valve to be used for the flow rate control device. SOLUTION: A throttle valve is arranged on the downstream side of a pressure reduction type pressure control valve, the secondary side of the throttle valve is connected to the rear side of a piston related to the drive of a valve mechanism of the pressure control valve, and when pressure variation is generated on the secondary side, the valve opening of the pressure control value is adjusted by the pressure. COPYRIGHT: (C)2004,JPO