| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrostatic actuator of a multilayer small electric machine in a liquid ejector. SOLUTION: The actuator is generated by settling in an electrode layer of an initial layer. The patterned layer of a sacrificial substance is formed in a first electrode layer in a manner that makes the area of the first electrode layer is exposed by a subsequent layer. A second electrode layer is settled and patterned in a subsequent layer. Subsequently, the third patterned layer of the sacrificial substance has an opened portion due to the exposed area of the first electrode layer and formed in the second electrode layer. The structure is settled in a third layer exposing the surface of the third layer, patterned and flattened. A third electrode layer is settled and patterned in the flattened structure and on the exposed surface. The sacrificial substance is partially removed, whereby the first electrode layer, the structure and the third electrode layer freely move correlatively with the second electrode layer. COPYRIGHT: (C)2004,JPO
|
