| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem of prior arts that there is still room for further improvement in the crystallinity of an Al electrode layer depending on a potential applied to a piezoelectric substrate when the film of a ground electrode layer whose principal component is Ti is deposited on a piezoelectric substrate by the vapor deposition method and the film of a main electrode layer whose principal component is Al is deposited to improve the crystallinity of the main electrode layer. <P>SOLUTION: When films of the ground electrode layer 5 and the main electrode layer 4 are deposited on the piezoelectric substrate 2 by the vapor deposition method, a float potential is applied to the piezoelectric substrate 2 so as to stabilize the surface potential of the piezoelectric substrate 2. <P>COPYRIGHT: (C)2004,JPO |
