发明名称 METHOD FOR RECOVERING CERIUM FROM CHROMIUM ETCHING SOLUTION
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method capable of efficiently recovering cerium from chromium etching solution containing cerium compound and chromium compound. <P>SOLUTION: The chromium etching solution is vaporized and concentrated and the cerium compond is crystallized, separated and recovered and also, the cerium in the separated solution after separating the cerium compound, is separated and recovered as oxalate. Into the solution containing trivalent chromium after separating the oxalate of trivalent cerium, an alkaline hydroxide is added and the trivalent chromium is precipitated as chromium hydroxide and separated to constitute a closed system. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004052007(A) 申请公布日期 2004.02.19
申请号 JP20020207364 申请日期 2002.07.16
申请人 HAYASHI JUNYAKU KOGYO KK 发明人 MATSUKAWA AKIHIKO;SAITO RYUICHI
分类号 B01D9/02;C22B3/44;C22B7/00;C22B9/02;C22B59/00;C23F1/46;H01L21/306;(IPC1-7):C22B59/00 主分类号 B01D9/02
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