CONDUCTIVE SENSOR, ITS MANUFACTURING METHOD, AND DEVICE HAVING THE SAME

摘要

PROBLEM TO BE SOLVED: To enhance sensitivity and reliability for a sensor using a conductive film. SOLUTION: When the conductive film wherein a silane compound having at least pyrrolyl groups are immobilized on a substrate surface via a siloxane bond and wherein a conjugated system is formed among the pyrrolyl groups is used for the various sensors, a pyrrolyl group moiety where the conductive conjugated system is formed is exposed on a surface, and conductivity is varied greatly by an atmosphere of the surface, that is, the highly sensitive sensor is provided thereby. The sensor is excellent in the reliability because the conductive film is immobilized by a chemical bond. COPYRIGHT: (C)2004,JPO