| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly accurate and stable liquid ejection head in which a liquid chamber and a piezoelectric element can be aligned readily with high accuracy, and to provide its manufacturing process. SOLUTION: A transparent or translucent and unablative diaphragm 2 is deposited on or bonded to a transparent or translucent and ablative substrate member 1 and a piezoelectric element 3 is bonded to the diaphragm 2. Subsequently, a liquid chamber machining region 5 is set through the transparent or translucent substrate member 1 and the diaphragm 2 using the piezoelectric element 3 as an alignment mark, a liquid chamber 6 and a common liquid chamber are formed in the substrate member 1 by laser ablation, and an orifice plate 7 is bonded to the substrate member 1, thus manufacturing a liquid ejection head. COPYRIGHT: (C)2004,JPO
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