ULTRA-PURE WATER SUPPLY EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide ultra-pure water supply equipment capable of supplying ultra-pure water markedly low in the concentration of impurities to a use point. SOLUTION: In the ultra-pure water supply equipment for supplying raw mater (city water) through a pretreatment apparatus 10, a primary pure water making apparatus 20, a secondary pure water making apparatus 40 and an ultra-pure supply piping system 60, the vibration of 1 to 100 Hz on the piping of the ultra-pure supply piping system 60 and instruments is set to 5 gal or less. COPYRIGHT: (C)2004,JPO