发明名称 Charge pump or other charge storage capacitor including PZT layer for combined use as encapsulation layer and dielectric layer of ferroelectric capacitor and a method for manufacturing the same
摘要 A charge storage capacitor includes a bottom electrode, a dielectric layer formed on the bottom electrode, and a local interconnect electrode formed on the dielectric layer, wherein the dielectric layer is an encapsulation layer, and a ferroelectric memory cell includes the charge storage capacitor.
申请公布号 US2004033630(A1) 申请公布日期 2004.02.19
申请号 US20030620681 申请日期 2003.07.15
申请人 FOX GLEN;EVANS THOMAS 发明人 FOX GLEN;EVANS THOMAS
分类号 H01L21/02;(IPC1-7):H01L21/00 主分类号 H01L21/02
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