| 发明名称 |
PLACING TABLE DRIVE DEVICE AND PROBE METHOD |
| 摘要 |
<p>A placing table drive device, comprising a horizontal drive mechanism (17) horizontally moving a placing table (1) for placing a wafer thereon and a lift drive mechanism (14) vertically moving the placing table, the lift drive mechanism further comprising first lift mechanisms (18) supporting and lifting the horizontal drive mechanism (17) and second lift mechanisms (19) supporting the placing table on the horizontal drive mechanism (17) and slightly lifting the placing table by piezo elements (19b).</p> |
| 申请公布号 |
WO2004015434(A1) |
申请公布日期 |
2004.02.19 |
| 申请号 |
WO2003JP09879 |
申请日期 |
2003.08.04 |
| 申请人 |
TOKYO ELECTRON LIMITED;YOSHIOKA, HARUHIKO |
发明人 |
YOSHIOKA, HARUHIKO |
| 分类号 |
G01R31/26;G01R1/06;G01R31/28;G01R31/319;H01L21/66;H01L21/68;H02N2/00;(IPC1-7):G01R31/28 |
主分类号 |
G01R31/26 |
| 代理机构 |
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代理人 |
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