| 发明名称 |
Method for production of a layered structure with nanocrystals in a dielectric layer |
| 摘要 |
<p>A method for production of a sandwich layered structure with nanocrystals in a dielectric layer for application in a memory device. <IMAGE></p> |
| 申请公布号 |
EP1389799(A1) |
申请公布日期 |
2004.02.18 |
| 申请号 |
EP20020018065 |
申请日期 |
2002.08.13 |
| 申请人 |
AARHUS UNIVERSITY |
发明人 |
GAIDUK, PETER;LUNDSGAARD HANSEN, JOHN;NYLANDSTED LARSEN, ARNE;HEINIG, KARL-HEINZ |
| 分类号 |
H01L21/20;H01L21/28;H01L21/3105;H01L21/316;H01L29/423;(IPC1-7):H01L21/20;H01L21/310;H01L33/00;H01L21/335 |
主分类号 |
H01L21/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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