| 摘要 |
PURPOSE: A semiconductor manufacturing apparatus is provided to be capable of preventing the opening phenomenon of a valve caused by the impact of the outside by installing a cap around the valve. CONSTITUTION: A semiconductor manufacturing apparatus is provided with a chamber and a gas pipe connected with the chamber for flowing predetermined gas into the chamber. The semiconductor manufacturing apparatus further includes a valve(100) for selectively controlling the gas flow of the gas pipe and a cap(200) installed around the valve. Preferably, the valve includes a stick type handle. Preferably, the cap includes a hole(210) for exposing the stick type handle. Preferably, the stick type handle is located at the inner portion from the hole. Preferably, the cap is spaced apart from the valve.
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