发明名称 |
Semiconductor wafer cassette |
摘要 |
A semiconductor wafer cassette has a first side wall, a second side wall opposite the first side wall, a front surface, and a back surface opposite the front surface. A body defines an internal bay portion with slots for vertically receiving wafers, each slot of the internal bay portion having one support slab. The body also includes two parallel legs for supporting the cassette and a handle for handling the cassette.
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申请公布号 |
US6691876(B2) |
申请公布日期 |
2004.02.17 |
申请号 |
US20020056357 |
申请日期 |
2002.01.25 |
申请人 |
ADVANCED SEMICONDUCTOR ENGINEERING, INC. |
发明人 |
TSAI YU-PIN;PAO CHIH-MIN;TSENG CHING-FENG;CHU FU-TANG |
分类号 |
H01L21/673;(IPC1-7):A47G19/08 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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