| 摘要 |
Substrates have anti-reflective hydrophobic surface coatings comprised of the reaction products of a vapor-deposited chlorosilyl group containing compound and a vapor-deposited alkylsilane. Most preferably the substrate is glass. In one preferred form of the invention, highly durable antireflective hydrophobic coatings may be provided by forming a silicon oxide anchor layer from a humidified reaction product of silicon tetrachloride, followed by the vapor-deposition of a chloroalkylsilane, preferably dimethyldichlorosilane (DMDCS). The layer thickensses of the anchor layer and the overlayer are such that the coating exhibits light reflectance of less than about 1.5% (more preferably less than about 1.0%) at a wavelength of about 525 nm (+/-50 nm).
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