发明名称 Lateral semiconductor component in thin-film SOI technology
摘要 A lateral semiconductor element (10) in thin-film SOI technology comprises an insulator layer (14) which rests on a substrate (12) and is buried under a thin silicon film (16), on top of which the source, or anode, contact (18) and the drain, or cathode, contact (22) are mounted. The anode contact (18) and the cathode contact (22) each lie over separate shield regions (28,30) within substrate (12), with the anode contact (18) being electrically connected with substrate (12).
申请公布号 US6693327(B2) 申请公布日期 2004.02.17
申请号 US20020074605 申请日期 2002.02.12
申请人 EUPEC EUROPAISCHE GESELLSCHAFT FUR LEISTUNGSHALBLEITER MBH 发明人 PRIEFERT DIRK;RUDOLF RALF;BOGUSZEWICZ VIKTOR;MICHALZIK FRANK;BUCKHORST ROLF
分类号 H01L21/331;H01L27/04;H01L27/12;H01L29/73;H01L29/739;H01L29/78;H01L29/861;(IPC1-7):H01L27/01;H01L31/039 主分类号 H01L21/331
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