发明名称 |
Light path deviation detecting apparatus and confocal microscope |
摘要 |
A light path deviation detecting apparatus has a diverging element for diverging a detection target light path into two light paths, and detects light receiving position on light receiving surfaces disposed spaced light path lengths different from each other in the diverged light paths. A tilt of the detection target light path is detected from the light receiving positions detected respectively.
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申请公布号 |
US6693272(B2) |
申请公布日期 |
2004.02.17 |
申请号 |
US20010799731 |
申请日期 |
2001.03.07 |
申请人 |
NIKON CORPORATION |
发明人 |
ADACHI AKIRA;UCHIDA TADASHI;AOSHIMA MIKIO |
分类号 |
G02B21/00;(IPC1-7):G02B21/06;G02B27/00;G01B11/26 |
主分类号 |
G02B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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