| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method and device for evaluating an anisotropic thin film, such as the liquid crystal oriented film, etc., used for a liquid crystal display element, etc. SOLUTION: In a method in which the oriented state of molecules in an anisotropic oriented film is evaluated by measuring the polarized state of reflecting light from a sample, all picture elements can be evaluated even when the measuring surface of a sample to be measured has different-height portions, because a sample stage having a rotary stage 201 which moves in the measuring surface of a sample, parallel movement stages 202 and 203 which horizontally move in orthogonal directions in the measuring surface of the sample, an inclined angle adjusting mechanism 204 which finely adjusts the inclination of the measuring surface of the sample, and a Z-axis stage 205 which can adjust the height of the measuring surface of the sample by moving upward and downward is held. In addition, the misalignment caused by the insufficient accuracy of the rotating stage 201 can be compensated through the fine adjustment of the parallel moving stages 202 and 203. |
