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发明名称
摘要
申请公布号
JP3497078(B2)
申请公布日期
2004.02.16
申请号
JP19980103595
申请日期
1998.03.31
申请人
发明人
分类号
H01L21/60;H01L21/50;H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/60
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代理人
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