发明名称 MSM-TYPE PHOTODETECTOR DEVICE WITH RESONANT CAVITY COMPRISING A MIRROR WITH METAL ELECTRODE GRATING
摘要 This invention relates to an MSM type photo-detection device designed to detect incident light and comprising reflecting means (2) superposed on a support (1), to form a first mirror for a Fabry-Pérot type resonant cavity, a layer of material (3) that does not absorb light, an active layer (4) made of a semiconducting material absorbing incident light and a network (5) of polarization electrodes collecting the detected signal. The electrodes network is arranged on the active layer and is composed of parallel conducting strips at a uniform spacing at a period less than the wavelength of incident light, the electrodes network forming a second mirror for the resonant cavity, the optical characteristics of this second mirror being determined by the geometric dimensions of the said conducting strips. The distance separating the first mirror from the second mirror is determined to obtain a Fabry-Pérot type resonance for incident light between these two mirrors.
申请公布号 AU2003269054(A1) 申请公布日期 2004.02.16
申请号 AU20030269054 申请日期 2003.07.24
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE 发明人 FABRICE PARDO;STEPHANE COLLIN;JEAN-LUC PELOUARD
分类号 H01L31/0232;H01L31/108 主分类号 H01L31/0232
代理机构 代理人
主权项
地址