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发明名称
Apparatus and method for non-destructive inspection on a patterned surface
摘要
申请公布号
AU2003261207(A8)
申请公布日期
2004.02.16
申请号
AU20030261207
申请日期
2003.07.21
申请人
APPLIED MATERIALS, INC.;APPLIED MATERIALS ISRAEL, LTD.
发明人
AVISHAY GUETTA;DORON SHOHAM;GILAD ALMOGY;RON NAFTALI
分类号
G01N21/95;(IPC1-7):G01N21/95;G01N21/956
主分类号
G01N21/95
代理机构
代理人
主权项
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