METHOD OF AND APPARATUS FOR CALIBRATING CANTILEVERS

摘要

A method of and apparatus for calibrating a cantilever (12) of a scanning probe microscope provide for applying radiation pressure to the cantilever so as to deflect the cantilever and measuring the deflection of the cantilever. Radiation pressure is provided by a focused beam of radiation, preferably a laser beam (14) and deflection of the cantilever is measured by measuring a reflection of the laser beam. Preferably, the laser light beam used for calibration is the same as that used for measurement of beam deflection in a scanning probe microscope. This provides an effective non-destructive calibration system which can be performed repeatedly without damaging the cantilever.