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发明名称
摘要
申请公布号
JP3496528(B2)
申请公布日期
2004.02.16
申请号
JP19980213234
申请日期
1998.07.28
申请人
发明人
分类号
C01G21/02;H01B3/00;H01B3/12;H01L21/822;H01L21/8246;H01L21/8247;H01L27/04;H01L27/10;H01L27/105;H01L29/788;H01L29/792;(IPC1-7):C01G21/02;H01L21/824
主分类号
C01G21/02
代理机构
代理人
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地址
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