摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generator, capable of monitoring the characteristic of X-ray with a high S/N ratio. SOLUTION: An electron beam generating means emits an electron beam. A vacuum vessel partitions, the flying passage of the electron beam emitted from the electron beam generating means. A laser optical system emits and propagates a laser beam, so as to make the beam collide with the beam of electrons flying in the vacuum vessel. A scattered light detecting means is arranged at a position out of the flying passage of the electron beam and the extension line thereof to detect a part of the scattered light generated by the collision of the electron beam with the laser beam. |